A Low Loss DC-Bias Line for Electrostatically MEMS Tunable Microwave Resonators and Filters
A new DC-bias line arrangement for MEMS actuators enables high-performance electrostatic actuation in tunable microwave resonators and filters without compromising radio frequency performance or introducing power loss.
Electrostatic actuation is a common method used to drive microelectromechanical systems (MEMS) devices. The activation is achieved by applying a voltage difference between opposite electrodes of a deformable capacitor. Currently, DC-bias line arrangements in electrostatic actuators substantially impair radio frequency performance and introduce power loss.
Purdue University researchers have developed a DC-bias line arrangement that permits electrostatic actuation of MEMS actuators for tunable microwave resonators and filters. It can achieve electrostatic actuation without compromising performance or introducing power loss.
Advantages:
-Achieves electrostatic actuation without compromising radio frequency performance or experiencing power loss
Potential Applications:
-Electronics industry
-Electronics manufacturing
TRL: 5
Intellectual Property:
Provisional-Patent, 2012-06-01, United States | Utility Patent, 2013-05-31, United States
Keywords: Electrostatic actuation, MEMS, DC-bias line arrangement, radio frequency performance, power loss, tunable microwave resonators, tunable filters, electronics industry, electronics manufacturing, deformable capacitor, Electrical Engineering, MEMS, Microwaves